In this study, cerium substituted yttrium iron garnet thin films with nominal formulaY_3-xCe_xFe₅O₁₂ and different x value  (x = 0,0.1,0.3,0.5,0.7) were fabricated on quartz substrates viasol-gel method and spin coating technique. Samples taken to check physical characteristics. The effect of Ce doping on the structural properties , surface morphology and magnetization of the films were studied respectively by X-ray diffraction analysis (XRD), atomic force microscopy (AFM), and vibrating sample magnetometer (VSM). (AFM) image of annealed samples showed that  the thin films had a smooth and continous surface.